Replace O-rings annually to prevent gas leaks.
MKS ASTRON® 2L is a remote toroidal plasma source designed for high-flow reactive gas generation, specifically optimized for cap N cap F sub 3
Unlike smaller, open-air wash and cure stations, the Astron 2L comes partially disassembled to protect the motor and LED array during shipping.
The (commonly cataloged under model lines like AX7651 or FI20620) is an industry-standard Remote Plasma Source (RPS) developed by MKS Instruments (originally under the ASTeX brand) . Primarily integrated into 200mm and 300mm semiconductor manufacturing tools, the Astron 2L utilizes patented Low-Field-Toroidal plasma technology to efficiently dissociate gases like Nitrogen Trifluoride ( NF3NF sub 3 mks astron 2l manual
The Astron 2L uses a 9-pin D-sub connector for the gauge. According to the official manual:
Digital and analog interfaces for easy integration. ⚠️ Safety Protocols
Requires (Grade 4.4 or better) for plasma ignition before transitioning to process gases. Replace O-rings annually to prevent gas leaks
+-------------------------------------------+ | MKS Astron 2L RPS Unit | +-------------------------------------------+ ^ ^ | | | v [3-Phase AC] [Gas Inputs] [Cooling Out] 180-228 VAC Ar / NF3 Gasses Water Loop Mechanical Integration
[System Purge & Pump Down] ──> [Argon Flow & Ignition Mode] ──> [RF Power Strike] ──> [NF3 Transition & Process Clean] Step 1: Pre-Ignition and Vacuum State
Verify that the downstream pressure has not suddenly spiked above 10 Torr. In this guide
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MKS Remote Plasma Refurbishment Data Sheet : Outlines maintenance procedures and service center information.